Size 100 – 450 mm
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Electrostatic Type Coulombic
Electrical Configuration AC, DC
Electrode Type Mono-polar, Bi-polar, Multi-polar
Dielectric Material High-Purity Alumina, Proprietary Coatings
What is ESC in semiconductor?
The electrostatic chuck (ESC) is used in a variety of semiconductor processes to hold the wafer during processing. ESCs employ a platen with integral electrodes which are biased with high voltage to establish an electrostatic holding force between the platen and wafer, thereby “chucking” the wafer.